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[29302] Artykuł: Raman and SEM studies of nanocrystalline Pd-carbonaceous filmsCzasopismo: Conference on Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments, Wilga, Poland, 25-31.05.2009. Proceedings of SPIE Tom: 7502ISSN: 0277-786X ISBN: 978-0-8194-7813-9 Wydawca: SPIE-INT SOC OPTICAL ENGINEERING, 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA Opublikowano: 2009 Seria wydawnicza: Proceedings of SPIE Autorzy / Redaktorzy / Twórcy Grupa MNiSW: Materiały z konferencji międzynarodowej (zarejestrowane w Web of Science) Punkty MNiSW: 10 Klasyfikacja Web of Science: Proceedings Paper DOI Web of Science Keywords: Pd-carbonaceous films  Raman  SEM  PVD  CVD  |
The results of Raman and SEM studies of Pd-carbonaceous films obtained by two methods are presented in this paper. The first method is PVD (Physical Vapour Deposition) with two separated sources containing precursors for films (1 - fullerenes C(60), 2- palladium acetate). The second method consists of two steps, the first step being PVD followed by CVD (Chemical Vapour Deposition) - the second step. In the first step a nanocrystalline Pd-C film is prepared. Later this film is used to obtain a nanoporous Pd - carbonaceous film in the CVD process. Prepared films contain 8 - 34 %wt. Pd.
Both kinds of films were studied using Raman and SEM methods. For the films obtained in the two-step method SEM images show porous structure for all samples. Raman spectra for the film with 8 % wt. Pd exhibit C(60) characteristic bands, while Raman spectra for films with higher content of Pd show D and G graphite characteristic bands. Films obtained by PVD are structurally different from films obtained by 2-steps method which is reflected in SEM images where no porous structure has been found.