Abstract: The work presents the results of Raman studies of carbon nanofilms containing Ni nanocrystalites in the context of the metal percentage by weight content on the film's order degree. The samples were obtained in two-stage PVD/CVD method. The analysis of Raman spectra confirms the presence of various carbon structures (amorphous carbon, graphite, fullerene, multi-walled nanotubes) in the matrix. The influence of the amount (Ni percentage by weight) and sizes of metal nanograins on the order degree of the nanofilm structure was observed.
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